Parts
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Screw, 1.02 Lg, Top Spindle 型號：15-00399-04READ MORE -
Screw Top Spindle 型號：15-00399-03READ MORE -
Screw, Top Spindle 型號：15-00399-02READ MORE -
Washer, #10 NickeL 型號：15-00386-00READ MORE -
Adjuster, Ceramic Gas Plate 型號：15-00043-02READ MORE -
Cable Assy, RF Current Sensor,... 型號：03-136562-02READ MORE -
Assy,2 Pices Wafer Lift Pin C2... 型號：02-122840-00READ MORE -
Heater Isolation PCB 型號：61-362273-00READ MORE